Edwards SCU-1600 - Page 132

SCU-1600 Control Unit for Turbomolecular Pump
March 10 120 Issue 1-a
7
MAINTENANCE
Referred
section
7.1.1 3.6.3 Section 3.6.3 Section 2.1 Instruction manual(B) Instruction manual(B) 4.1.1 4.1.2
Countermeasures
1. Contact Service office. 2. Contact Service office. Change the AC input voltage 200 V. Contact Service office. 1. Check whether or not a
power failure has occurred.
2. Connect the power cable
correctly.
3. Replace the power cable. 4. Set the voltage to the rated
volta
g
e±10%.
1. Set the temperature of the
baking heater to 120 ºC (248 ºF) or less.
2. At the time of baking or gas
pumping, always cool the STP pump.
3. Check the piping system
for leakage.
4. Repetitions start/stop
operations may cause the STP pump to overheat.
Probable causes
1. Failure of the STP pump. 2. Failure of the SCU-1600. Incorrect connection of the input power supply. Failure of the STP pump. 1. Power failure. 2. Incorrect connection of the
power cable.
3. Failure of the power cable. 4. Insufficient power supply
volta
g
e.
1. Overheating during baking. 2. Insufficient cooling. 3. Leakage of the vacuum
piping system.
4. Repetition start/stop.
operations.
Pump operation
Touch down. The magnetic bearing output stops and the rotor is descended on the touch down bearin
g
.
Touch down. The magnetic bearing output stops and the rotor is descended on the touch down bearin
g
.
Decelerate and stop. Decelerate and stop. Decelerate and stop.
Occurrence condition
Excessive magnetic bearing electric current continues for 30 sec. Connection of the STP pump not corresponding to the input power supply (100 V). Disconnection of the temperature sensor of the STP pump. Insufficient power supply. Overheating inside the STP pump.
LCD Messages
Inordinate Current Insufficient Supply M_Temp Sensor Lost Mains Failure Motor Overheat
Table 41 - Error messa
g
es after self test
(
continued
)