Edwards SCU-1600 - Page 133

SCU-1600 Control Unit for Turbomolecular Pump
March 10 121 Issue 1-a
7
MAINTENANCE
Referred
section
3.6.1 3.9.1 3.6.1
Countermeasures
Turn OFF, and connect the STP motor connection cable correctly. Perform tuning after power ON operation. When the error is displayed after tuning, contact Service office. Contact Service office. 1. Connect the cable
correctly. If the cable is not locked, lock it securely.
2. Contact Service office. Contact Service office. Contact Service office. Contact Service office. Contact Service office. Contact Service office. Contact Service office.
Probable causes
1. Incorrect connection of the
STP motor connection cable.
2. Failure of the STP motor
connection cable.
3. Failure of the STP pump. 4. Failure of the SCU-1600. Failure of the SCU-1600. 1. Incorrect connection of the
STP connection cable.
2. Failure of the STP
connection cable.
Failure of the SCU-1600. Failure of the SCU-1600. Failure of the SCU-1600. Failure of the STP pump. Failure of the SCU-1600. Failure of the SCU-1600.
Pump operation
Touch down. The magnetic bearing output stops and the rotor is descended on the touch down bearing. Rotation is inoperative. Breaker OFF. Decelerate and stop. Touch down. The magnetic bearing output stops and the rotor is descended on the touch down bearin
g
.
Decelerate and stop. Decelerate and stop. Decelerate and stop. Decelerate and stop. Decelerate and stop. Decelerate and stop.
Occurrence condition
Motor resistance measurement is impossible. Rotational speed exceeds rated speed. Disconnection of the STP connection cable. Failure of record in memor
y
.
Failure of serial communication. Abnormal power circuit. Failure of record in memor
y
.
Abnormal memory. Failure of serial communication.
LCD Messages
Motor Resistor Lost Overspeed 1 Overspeed 2 Overspeed 3 P.Cable Disconnected PCB Record Failure PCB->DSP Com Fail Power Supply Failure Pump Record Failure Ram Error R-Unit Com Failure
Table 42 - Error messages after self test (continued)