Edwards SCU-1600 - Page 134

SCU-1600 Control Unit for Turbomolecular Pump
March 10 122 Issue 1-a
7
MAINTENANCE
Referred
section
Section 7.3.3 and 3.12 Section 3.6.2 Section 3.11.3 Instruction manual(B)
Countermeasures
Contact Service office. Overhaul is needed. Contact Service office. 1. Contact Service office. 2. Contact Service office. Overhaul is needed. Contact Service office. Set "Warning Damage Point" to "DISABLE" to release the error and continue operation temporar
y
.
1. Connect the cable
correctly. If the cable connector is not locked, lock it securely.
2. Contact Service office. 3. When the TMS function is
not in use, set the TMS function to "DISABLE".
1. Connect the
electromagnetic cooling water valve correctly. Check the volume of water and water temperature.
2. Contact Service office.
Probable causes
Failure of the SCU-1600. Frequency of "Disturbance" or "Mains Failure" error. 1. STP pump failure. 2. Failure of the SCU-1600. Frequency of "Disturbance" or "Mains Failure" error. 1. Disconnection of the TMS
connection cable.
2. Failure of the TMS
connection cable.
3. Incorrect setting of the
TMS function.
1. Cooling failure of TMS unit. 2. Failure of TMS unit.
Pump operation
Decelerate and stop. Decelerate and stop. Free run
*1
Rotation is inoperative. Decelerate and stop. Decelerate and stop.
Occurrence condition
Abnormal board connection. When the extent of the damage on the touch down bearing exceeds the second dama
g
e limit.
Abnormal rotational speed detection. "Second Damage Limit" occurs. TMS connection cable is not connected when the state "TMS Function" is set to "ENABLE". TMS temperature control error (when the TMS unit detection temperature becomes higher than the setting value by 10°C (+18 ºF
)
or more.
LCD Messages
R-Unit Failure Second Damage Limit Speed Pulse Lost START NOT ALLOWED T. Cable Disconnect TMS Higher Temp
*1
The driver output stops and the rotor continues rotating by inertia. It may take several hours to stop. To stop the STP pump quickly, close the vacuum valve at the outlet port
flange and introduce gas from the purge port into the STP pump.
Table 43 - Error messa
g
es after self test
(
continued
)