SCU-1600 Control Unit for Turbomolecular Pump
March 10 30 Issue 1-a
3
INSTALLATION
Note: Tuning can be performed only while the STP pump is in the LEVITATION state. (It cannot be
performed while the STP pump is in the ACCELERATION, NORMAL OPERATION, or BRAKE
state)
When performing the tuning during remote operation, press the "RESET" switch on the front
panel after switching the "REMOTE" switch to MANUAL. (The remote signal cannot be used
for tuning)
Once tuning is completed, re-tuning is not required unless the configuration (the STP pump
serial number, the SCU-1600 serial number, and the STP connection cable length) is changed.
Although the STP pump produces an abnormal noise during tuning, this is not an indication of
abnormality.
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