Edwards SCU-1600

SCU-1600 Control Unit for Turbomolecular Pump
March 10 31 Issue 1-a
3
INSTALLATION
A. Press "RESET" switch C. Press "ENTER" switch
B. Press "UP" or "DOWN" switch D. Press "RESET" switch for
approximately 3 seconds
Figure 23 - Tuning procedures
CAUTION
Coupling is Chang
ed
Autotest
2009/MAY/20 15:40
CAUTION
Pump Type is Changed
STP-A2503/A3003
DATA COPY? No
STP- A2503/A3003
DATA COPY? Yes
Press RESET 3sec
to Update Data
Updating Data
from Pump to PCB
Updating Data
Re-initializing
Tuning
Tuning complete
Levitation
Software Version
76_A * ．*
A
B
D
C
Autotest complete
Autotest Complete