ERS AirCool plus - AirCool System Specifications

ERS
®
Manual / AirCool
®
plus -System / SP72_TA1C8 / -55°C +200°C / Ver. 02.02 10
3.3.2 The AirCool
®
plus -System SP72-TA1C8
Temperature range -55°C to +200°C
Temperature sensor PT100, 4-line wired
Temperatur stability
±0,08°C
Thermo device Air / Heater
Temperature repeatability
±0.2°C
Transient temperature rise time after
placing the wafer at +85°C
18sec
Heating and cooling rate *)
(measured at +25°C ambient
temperature)
heating rate
cooling rate
(see also „Temperature-Time diagram“)
+25°C to +200°C 25min
-55°C to +25°C 10min
+25°C to -55°C 15min
+200°C to +25°C 10min
Power supply 100/ 115/ 200/ 230V
50/ 60Hz
Compressed air supply 310 l/min at 6.0 bar
Data specified at +25°C ambient temperature. Specifications are subject to change due technological design improvements. No
responsibility for inadvertent errors.
.
*) depends on probe station type and chuck air supply tubes installations.