ERS AirCool plus - Controller SP72 Specifications; Chuck TA1 C8 Specifications

ERS
®
Manual / AirCool
®
plus -System / SP72_TA1C8 / -55°C +200°C / Ver. 02.02 11
3.3.3 The Controller SP72
Smallest temperature preselection step
± 0,1°C
Chuck temperature display resolution 0,01°C
Control method DC / PID
Interface to prober or PC RS232C or IEEE-488
Power consumption 450VA
Weight 24 kg
Dimension 19" rack 3HE
483mm x 144mm x 326mm
3.3.4 The Chuck TA1C8
Chuck surface Diameter 206mm
Chuck surface plating Nickel, optional Gold
Temperature sensor PT100, 4-line wired
Thermal transition resistance of the
chuck against the wafer
<0.3°C/W
Temperature uniformity
including thermal gradient of chuck
surface
at -55°C ±1,0°C
at +25°C ±0,5°C
at >100°C ±0,5% of the actual
temperature value
Surface flatness and base parallelism
-55°C ±15µm
+25°C ± 8µm
+200°C ±14µm
Dielectric resistance at 100V at +25°C > 0.8*10
12
Ohm
Capacitance against ground <1900pF (40 pF triaxial connected)
Height 28mm ± 0.05mm
Weight 4500g
Data specified at +25°C ambient temperature. Specifications are subject to change due to technological design improvements.
No responsibility for inadvertent errors.