ERS AirCool plus - Voltage Selection

ERS
®
Manual / AirCool
®
plus -System / SP72_TA1C8 / -55°C +200°C / Ver. 02.02 17
5 Setting up the system
5.1 Interconnections Overview
Fig. 5.1a Interconnections Overview
Airpressure6bar
Dew point <-45°C
Air supply max. 310 l/min
AirCool Chuck
TA1C8
Prober
Available Chucksize: 6" or 8"
AirCool 8" Chuck System -55°C +200°C
Chiller 03
Pow er supply
100/110/200/230 V
50
/
60
H
z
AC1
ACM325
ACK004
AC054
XC12
XC32
P1
P7
P6
P5
P4
P3
P2
Dew point sensor ACM218
AC100
ACK005
AC02
XC1
ACK001
XR4
XR1
P2 P1
F2 F1
XR2
XR5
IEEE-488
F8 F6
XR3
In Out
Air
P12
P10
Flushing chamber
air exhaust
Pow er s u pp ly
100/110/200/230 V
50/60 Hz
Controller SP72