ERS AirCool plus - System Summary; System Description

ERS
®
Manual / AirCool
®
plus -System / SP72_TA1C8 / -55°C +200°C / Ver. 02.02 7
3.1 System summary
The ERS
®
thermo control systems are used in the semiconductor industry for
temperature characterization or failure analysis of wafers, chips or hybrids.
The AirCool
®
plus Chuck in combination with the AirCool
®
plus Controller are
particularly suitable to provide rapid temperature adjustment and a precise
environment for probing semiconductor wafers, chips or hybrids. This system has a
temperature range of -55°C to +200°C.
1 = actual temperature message
2 = electrical power control
3 = air control
4 = dew point control
5/ 6 = communication with the prober or an external computer via
interface RS232C respectively IEEE-488
AirCool
®
plus
Chuck
Controller SP72
+
Chiller 03
Interface
RS232C
Power supply
Fig. 3.1a Functional block diagram of an ERS
®
AirCool
®
plus -Systems
Air input
1
2
3
Interface
IEEE-488
56
4
Caution
Use in other field of operation is not permitted.