ERS AirCool plus - RS232 C Interface; Interface Settings

ERS
®
Manual / AirCool
®
plus -System / SP72_TA1C8 / -55°C +200°C / Ver. 02.02 33
8.4 Dew point control
The AirCool
®
plus -System SP72-TA1C8 provides a dew point close loop system to
avoid any ice-formation on the wafer.
Moisture or ice-formation will occur if the chucktemperature is below the dew point of
the ambient air.
To prevent this situation the chucktemperature is controlled by the dew point
monitoring in such a way, that the chucktemperature never goes below the dew point
of the ambient air.
(This means, the chuck system will reach a low set temperature only if the dew point
of the ambient air is lower than the target temperature.)
If the set temperature cannot be reached because of the dew point, a "ÿ"("ÿ ")
flashes at the display.
In case the dew point gets worse by more than 8°C above the actual
chucktemperature, the chuck heats up to +18°C automaticaly and returns to set the
temperature when the dew point improves.
This is shown at the display with "ÿ ".
In case the dew point gets worse by more than 16°C above the actual
chucktemperature, the chuck heats up to +50°C automaticaly and returns to +25°C
for safety.
This is shown at the display with "ÿ ".
The operator may intentionally disable the dew point close loop controll. In this case
the operator must be aware of the risk of ice-formation.
Disable dew point close loop control:
ÿ manually with key or
ÿ remotely with the interface command "SD1"
Disable dew point close loop control will be displayed at the front panel at the dew
point display (16) with flashing dew point and "OFF" alternating.
Enable dew point close loop control:
ÿ manually with key again
ÿ remotely with the interface command "SD0" or
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