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Overview of the system's purpose and application in the semiconductor industry.
Detailed explanation of the AirCool® plus System's components and features.
Technical specifications of the AirCool® plus System, including operating conditions and power requirements.
Specifies environmental and supply conditions required for optimal system performance.
Details technical specifications for the AirCool® plus System model SP72-TA1C8.
Lists detailed specifications for the SP72 Controller unit.
Lists detailed specifications for the TA1C8 Chuck unit.
Outlines limitations and specific procedures for system operation and setup.
Illustrates the heating and cooling performance curve of the system.
Guidelines for safely moving and transporting the system equipment.
Specifies optimal ambient temperature and humidity for storing the system.
Instructions for unpacking and checking all components included in the system delivery.
Provides physical dimensions for the system's components (Chuck, Controller, Chiller).
Illustrates the electrical and pneumatic connections between system components.
Instructions for selecting the correct operating voltage for the controller.
Instructions for selecting the correct operating voltage for the Chiller 03.
Details the electrical and pneumatic connections for the TA1C8 Chuck.
Details the electrical and pneumatic connections for the Chiller 03.
Step-by-step guide for assembling pneumatic tubes between chiller and probe station.
Guidance on initial system setup, checks, and potential issues during first use.
Identifies and explains the controls and displays on the front panel of the controller.
Details the function of each key on the controller's front panel.
Explains the meaning of various LEDs and displays on the controller.
Describes the Hold mode for stable temperature measurements and its selection.
Explains how to set and return from the system's standby mode.
Details the defrost mode for removing ice and moisture and how to quit it.
Explains the dew point close loop system and how to enable/disable it.
Specifies the standard communication parameters for the RS232C interface.
Step-by-step guide to modify RS232C interface settings like transmission rate and protocol.
Describes the serial interface operation with or without a special transmission protocol.
Lists and explains various commands for controlling the SP72 via interface.
Details commands for setting system parameters like temperature, mode, and lock status.
Details commands for requesting system status, temperature, and error information.
Instructions for setting the IEEE-488 interface address on the controller.
Lists the supported interface functions for the IEEE-488 standard.
Guidance on controlling the system remotely using the IEEE interface.
Lists commands for setting system parameters via the IEEE interface.
Explains how to retrieve information using response strings via the IEEE interface.
General guidance on handling and troubleshooting error messages.
Step-by-step procedure for replacing power transistors.
Step-by-step procedure for replacing the power amplifier NB1.
Procedures for checking the electrical connection of the chuck cable.
Information regarding Fuse F10 in the Chiller 03 and its non-changeable nature.
Explains the pinout for the serial interface connector XR2.
Provides international and PT100 resistance conversion tables.
Lists available spare parts with their corresponding part numbers.
General| Brand | ERS |
|---|---|
| Model | AirCool plus |
| Category | Controller |
| Language | English |
