QD002-07 3. Machine Set Up
NXT Setup Manual 95
Signal Cable Connection Diagram
(2M Base - 2M Base - Independent 4M Base)
Base connection harnesses AJ457** (2M - 2M) and AJ517** (4M - 2M) are shown in bold.
NXTSET205Ea
2M Base - 2M Base - 4M Base - Vacuum Pump Harness Connection Diagram (1/4)
RH1162*
RH0562*
RH1186*
RH1186*
CN-M2
CN-1
CN-2
CN-M2
CN-M1
CN27A
CN28A
CN27B CN27B
BRCN1
BRCN2
BLCN2
BLCN2
BLCN3
BLCN3
CN-M1
CN-M2
BLCN3
BRCN3
BLCN3
BRCN3
BRCN3
BRCN2
BRCN3
BLCN4
To I/F CN27
To I/F CN28
2M base
Module 1 & 2
Left side
module cover
RH0527*
RH0558*
RH1170*
RH2012*
A
B
C
D
E
F
G
H
I
J
RH1188*
RH0559*
RH0560*
Disconnect RH0584*, then
connect RH0559*.
RH1280*
Previous stage signal
(Fixed)
(Cable)
Disconnect BRCN3 of RH0583*,
then connect BRCN3 of RH0560*.
Connected when
shipped
RH0067*
Lane 2-F
Lane 2-R
Lane 1-R
Lane 1-F
Circuit breaker bracket
Previous stage side
Next stage side
BRCN3
Panel loading
signal bracket
(Previous stage)
Panel loading
signal bracket
(Next stage)
Panel flow