8 Maintenance 67
Translation of the original operating instructions Ecotec E3000, kina22en1-19, 1507
You will need the following tool for maintenance:
2 screwdrivers, size 2
Box wrench, 19 mm (included in the delivery scope)
Allen wrench, 8 mm (included in the delivery scope)
Allen wrench, 3 mm (not included in the delivery scope)
Tweezers
1
Heavier soiling of the measurement environment can also require earlier replacement.
Explanation of maintenance levels:
Maintenance level I: Customer without any technical training
Maintenance level II: Customer with technical and INFICON training
Maintenance level III: INFICON Service
Material damage from rotating parts
The turbo molecular pump requires 5 minutes to power down.
► Allow the turbo molecular pump to power down before any maintenance work is
performed or before moving the device.
Table 11: Maintenance schedule
Maintenance Material description Parts
number
Operating hours Period Maintenance
level
500 2000 10,000
Check the sinter filter of the sniffer probe and
replace, if necessary.
Sinter filter for sniffer probe 200 03 500 X
1
I
Replace the filter inserts of the capillary filters and
the water conservation tip.
Felt for capillary filter 200 001 116 XI
Clean or replace the main air filter in the floor of
the housing.
Air filter Ecotec E3000 (104 x 154 mm;
5pcs.)
200 001 552 XI
Check the internal filter and replace, if necessary
(three pcs.).
Internal filter 200 03 679 XII
Replace operating fluid reservoir of the turbo
molecular pump.
Operating fluid reservoir
The date on the packaging is the latest
possible installation date.
200 003 801 3 years II
Replace the membranes of the diaphragm pump. Wear parts set for diaphragm pump 200 03 504 X III
Replace gas store no later than after 2 years of
operation. Maximum durability, storage plus
operation: 3 years
Replacement gas store 531-010 2 years
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