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Inficon Ecotec E3000 Original Operating Instructions

Inficon Ecotec E3000
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10 Appendix 79
Translation of the original operating instructions Ecotec E3000, kina22en1-19, 1507
R13B1 CF
3
Br 69 149.0 1.00 3.5E+07 0.852
129 0.12
131 0.12
148 0.10
150 0.10
R14 CF
4
69 80.0 1.00 7.0E+07 0.857
50 0.70
R21 CHFCl
2
67 102.9 1.00 7.0E+07 0.535
69 0.35
R22 CHF
2
Cl 51 86.5 1.00 7.6E+07 0.632
67 0.11
R23 CHF
3
69 70.0 1.00 2.4E+08 0.704
51 0.93
50 0.17
R32 CH
2
F
2
51 52.0 1.00 1.7E+08 0.632
52 0.70
R41 CH
3
F 34 34.0 1.00 7.0E+07 0.551
33 1.00
R50 CH
4
Methane 15 16.0 1.00 7.0E+07 0.556
R113 C
2
F
3
Cl
3
101 187.4 1.00 7.0E+07 0.484
151 1.00
R114 C
2
F
4
Cl
2
85 170.9 1.00 7.0E+07 0.545
135 1.00
R115 C
2
F
5
Cl 85 154.5 1.00 7.0E+07 0.627
119 1.00
R116 C
2
F
6
69 138.0 1.00 7.0E+07 0.709
119 1.00
R123 C
2
HF
3
Cl
2
83 152.9 1.00 7.0E+07 0.540
85 1.00
R124 C
2
HF
4
Cl 67 136.5 1.00 7.0E+07 0.581
51 1.00
R125 C
2
HF
5
51 120.0 1.00 6.7E+07 0.653
69 0.27
101 0.35
R134a C
2
H
2
F
4
69 102.0 0.72 1.1E+08 0.591
83 0.46
51 0.12
R141b C
2
H
3
FCl
2
81 117.0 1.00 7.0E+07 0.464
67 1.00
R142b C
2
H
3
F
2
Cl 65 100.5 1.00 1.6E+08 0.494
85 0.19
Table 13: Gases and their mass position (cont.)
Gas Formula Other
designation
Measuring position
(xxx amu)
Molecular mass
(xxx.x amu)
Fragmentation
factor
Normalization factor
(x.xExx)
Viscosity

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Inficon Ecotec E3000 Specifications

General IconGeneral
BrandInficon
ModelEcotec E3000
CategorySecurity Sensors
LanguageEnglish

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