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Inficon Ecotec E3000
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84 10 Appendix
Translation of the original operating instructions Ecotec E3000, kina22en1-19, 1507
R1234z(e) C
3
H
2
F
4
69 114.0 1.00 3.4E+08 0.600
64 0.82
95 0.48
R1243z(f) C
3
H
3
F
3
95 96.0 1.00 2.9E+08 0.600
77 0.52
51 0.48
69 0.41
96 0.85
Ar Argon
40 40.0 1.00 7.0E+07 1.127
CO2 R744
44 44.0 1.00 1.0E+08 0.744
H2 Hydrogen
2 2.0 1.00 1.8E+06 0.448
H2O R718
18 18.0 1.00 7.0E+07 0.459
He Helium
4 4.0 1.00 2.4E+07 1.000
HT135 Galden HT135
100 610.0 0.08 1.2E+07 1.000
69 1.00
119 0.45
169 0.42
131 0.03
Kr Krypton
84 84.0 1.00 7.0E+07 1.275
N2 Nitrogen
28 28.0 1.00 7.0E+07 0.892
Ne Neon
20 20.2 1.00 7.0E+07 1.586
NH3 R717
17 17.0 1.00 7.0E+07 0.505
O2 Oxygen
32 32.0 1.00 7.0E+07 1.030
SF6
127 146.1 0.80 9.1E+07 0.765
Xe Xenon
129 131.3 1.00 7.0E+07 1.153
132 1.00
ZT130 Galden ZT130
100 497.0 0.25 7.0E+07 1.000
117 0.32
119 1.00
69 0.50
135 0.12
Table 13: Gases and their mass position (cont.)
Gas Formula Other
designation
Measuring position
(xxx amu)
Molecular mass
(xxx.x amu)
Fragmentation
factor
Normalization factor
(x.xExx)
Viscosity

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