First Operation Check 35
iina70e 03.fm technical handbook(1408)
After power on a welcoming picture appears on the screen of the control panel Fig.
3-1/1, then status information on the speed of the turbo pump, the foreline pressure,
the emission and the active filament are given.
The start up procedure takes about 3 minutes and the end is indicated by a beep.
The UL1000 and UL1000 Fab is in Stand-by mode now.
4 Check if the inlet port Fig. 3-1/2 is blanked off. If not, please mount a blind flange with
O-Ring on the inlet port.
5 Press the START Button Fig. 3-2/6. The inlet will be evacuated and the measured
leak rate will be displayed a moment later.
This is the measurement mode. If a test part was connected you would start spraying
Helium to identify leaks.
Fig. 3-1: Top view of the Standards
Pos. Description Pos. Description
1 Control Panel 2 Inlet Port
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