Keithley 6487 Reference Manual

G
Applications Guide
• Measurement considerations — Covers measurement considerations for low cur-
rent measurements including Leakage currents and guarding, Input bias current,
Voltage burden, Noise and source impedance, Electrostatic interference and shield-
ing, and Making connections.
• Applications — Covers applications to measure Diode leakage current, Capacitor
leakage current, Measuring high resistance, Cable insulation resistance, Surface
insulation resistance (SIR), Photodiode characterization prior to dicing, Focused
ion beam applications and Using switching systems to measure multiple current
sources.

Keithley 6487 Specifications

General

Type	Picoammeter/Voltage Source
Current Measurement Range	20 fA to 20 mA
Interfaces	GPIB, RS-232
Voltage Burden	< 200 µV
Input Impedance	>10^14 Ω
Power	100 V / 120 V / 220 V / 240 V
Basic Current Measurement Accuracy	0.4%