Keithley S530

Section 3: Test subroutine library reference S530 Parametric Test System Test Subroutine Library User's Manual
3-72 S530-907-01 Rev. A / September 2015
V/I polarities
N-channel +V
DS
, +Vlow, +Vhigh, -V
BS
, +I
THR
P-channel -V
DS
, -Vlow, -Vhigh, +V
BS
, -I
THR
Source-measure units (SMUs)
 SMU1: Force vds, trigger on ithr, default current limit
 SMU2: Search V
GS
, 10.0 μA current limit
 SMU3: Force vbs, default current limit
Example
result = vtati(d, g, s, sub, vlow, vhigh, vds, vbs, ithr, niter)
Schematic