LEYBOLD MAG Series User Manual

GA05141_0702 - 09/2004
10
Description
1.3 Design of the MAG
The MAG comprises basically the pump housing, the multistage rotor with
the stator package, the drive, and a magnetic bearing.
Rotor
The rotor is made from a high strength aluminium alloy. The rotor and the
lower stator plates are protected with a special ceramic layer ( KEPLA-
COAT
®
). The standard rotor is a multi-stage axial-flow turbine. In addition
to the turbine stage the wide range rotor has a screw stage.
Both rotors are machined from one piece and the geometry of the the bla-
des is optimized for high compression and pumping speed of the typical
gases used in semiconductor manufacturing processes.
Bearings
The MAG has a built-in precision 5-axes controlled magnetic bearing. The
rotor is suspended by trouble-free magnets:
■ along two orthogonal axes in each of two radial planes
■ and completely in the axial direction
The bearing concept allows for low vibration operations and insures opera-
tion of the pump in any mounting position. Magnetic bearings also guaran-
tee ultra-clean vacuum because no grease is used for lubrication of bea-
rings.
Two touch down bearings are provided to stabilize the rotor mechanically if
impacts occur during operation. They are only used in case of the breaking
of the power supply or BEARING cable during operation, strong shocks, or
faulty electronics.
Motor and control
A DC motor without commutator is used to power the rotor.
Drive voltage for the motor and the operating voltage for the magnetic bea-
ring are supplied by the MAG.DRIVE
digital
frequency converter. It also hand-
les the automatic monitoring of these systems.
The pump is equipped with a data storage device which stores the impor-
tant operating parameters during the complete operation time of the pump.
The converter monitors continously all important operating parameters and
provides warning and alarm signals in case the operating conditions
exceed the specification or the set threshold.
Touch down bearings
Ceramic layer
Magnetic bearing
Data storage

LEYBOLD MAG Series Specifications

General

Applications	Laboratory, medical, and industrial applications
Drive	Magnetic drive
Sealing	Hermetically sealed
Flow Rate	Varies depending on the model, ranging from a few liters per minute (LPM) to several tens of LPM. Consult specific model datasheets for precise values.
Max Pressure	Varies by model (typically up to 10 bar)
Power Supply	Typically available in various AC voltages (e.g., 115V, 230V) and frequencies (50/60 Hz)
Power Consumption	Varies depending on the model, ranging from a few watts to several hundred watts. Consult specific model datasheets for precise values.
Operating Temperature	Typically 0°C to +60°C
Weight	Varies depending on the model, ranging from a few kilograms to several kilograms. Consult specific model datasheets for precise values.
Dimensions	Varies depending on the model. Consult specific model datasheets for precise dimensions.
Materials	Stainless steel