LEYBOLD MAG Series User Manual

GA05141_0702 - 09/2004
48
Installation
2.4 Connecting the backing pump
A two stage rotary vane pump or dry-compression backing pump is requi-
red to support operation of the MAG.
In case of high gas throughput, it may also be necessary to use a roots blo-
wer to achieve the backing pressure necessary for operating the MAG.
Fig. 34 shows schematically the design of a pump system incorporating a
MAG with an additional foreline valve and an isolation valve between cham-
ber and MAG.
The foreline isolation valve is recommended to protect the MAG from shock
venting in case of uncontrolled shut down of the backing pump. This valve
must be able to close fast enough to avoid pressure increase in the MAG.
In case of an oil-sealed backing pump the foreline isolation valve protects
the MAG from backstreaming oil vapor during standstill.
Connect the forevacuum flange of the MAG to the backing pump.
The torque on the forevacuum connection flange must not exceed the
values shown in Fig. 35.
Fig. 34 Layout of a turbomolecular pump system
1Turbomolecular pump
2 Forevacuum gauge point
3 Backing pump
4 Anti-vibration bellows
5 Forevacuum valve
6 High vacuum valve
7 Purge gas connection
8Valve in the roughing line
9 Electronic frequency converter
— — — — roughing line; recommended
if shorter cycle times are to be achieved
— · — · — · — · DRIVE/BEARING and TMS cable
Foreline valve

LEYBOLD MAG Series Specifications

General

Applications	Laboratory, medical, and industrial applications
Drive	Magnetic drive
Sealing	Hermetically sealed
Flow Rate	Varies depending on the model, ranging from a few liters per minute (LPM) to several tens of LPM. Consult specific model datasheets for precise values.
Max Pressure	Varies by model (typically up to 10 bar)
Power Supply	Typically available in various AC voltages (e.g., 115V, 230V) and frequencies (50/60 Hz)
Power Consumption	Varies depending on the model, ranging from a few watts to several hundred watts. Consult specific model datasheets for precise values.
Operating Temperature	Typically 0°C to +60°C
Weight	Varies depending on the model, ranging from a few kilograms to several kilograms. Consult specific model datasheets for precise values.
Dimensions	Varies depending on the model. Consult specific model datasheets for precise dimensions.
Materials	Stainless steel