GA05141_0702 - 09/2004
111
Index
Index
A
acceleration 60, 61, 66, 73, 75-79,
83, 84, 95, 97, 98
ambient temperature 15-18, 44, 95,
97, 103
B
backing pressure 48, 96, 98, 103
backing pump 15-17, 48, 72, 75, 76,
91
C
contamination 19, 91, 92, 108
cooling water 15-17, 22, 34-43, 50-
52, 60, 68, 72, 75, 76, 80, 83, 86,
89, 91, 92, 95, 97, 99, 100, 102
corrosive 7, 9, 54, 56, 72, 76, 91, 108
cycles 4, 66, 81, 83, 88, 89, 90, 95,
97, 99
D
dangerous voltage 5
data storage 10, 80
DC motor 10, 12
deceleration 60, 61, 66, 73, 76, 78,
79, 95, 97
deposits 9, 53, 95, 97
dimensions 24-33
dripping water 58
DRIVE/BEARING 7, 23, 34-43, 48, 63
E
earthquake protection 47
emergency off 60, 61, 96, 100
explosive 9, 108
F
forevacuum 4, 14-18, 20, 22, 25, 34-
43, 48, 49, 55, 67, 70, 71, 90-92
forevacuum flange 14-18, 34-43, 48
fuse 14, 19, 58, 101, 103
G
generate 9
H
hazardous gases 49, 91
hazardous voltages 58, 59
hot components 5, 47
I
intake flange 14, 34-43, 45, 91
K
key 66, 72, 75-78, 82, 89, 96
L
LED 12, 54, 72, 73, 103
M
magnetic bearing 7, 10, 12, 59, 66,
80, 96, 100, 102
magnetic field 44
mains 5, 12, 13, 58, 59, 63, 66, 68,
78, 79, 82, 83, 86, 88, 89, 91, 94,
96, 99, 103
media 9, 53, 54
motor current 60, 61, 70, 77, 83, 86-
89, 96, 100
motor temperature 61, 80, 95, 97, 100
N
noise level 44
O
operating status 76, 77
ordering data 21, 23
P
PE bag 14, 44, 45, 92
PK 23, 34-43, 59, 81, 88, 96, 102
plug-in control 7, 12, 13, 21, 65, 75-
89, 105
Pumping speed 10, 15-18, 20
purge gas 9, 13, 19, 20, 34-43, 48,
53-57, 60-62, 66, 67, 72, 75, 76,
86, 96, 98, 103
Purge/Vent 7, 23, 63, 84, 86, 89
R
radiation 44, 71
relay 12, 19, 60, 61, 70, 78, 83, 86, 89
remote control 12, 73, 94
S
seal kit 14, 21, 91, 93
serial interface 12, 59, 62, 83, 96
shock 48, 66, 96, 98
splinter guard 14, 18, 20, 34-43, 45
stand-by 19, 60, 66, 73, 78, 79, 83-
86, 99, 103
T
technical data 15-19, 54
temperature sensor 22, 95, 97, 99-102
TMS 7, 9, 12-14, 22, 23, 36, 38, 39,
48, 59-63, 68-70, 72, 75, 77, 80,
82-84, 86-89, 100-103
torque 4, 34-43, 45, 46, 48, 90
touch-down bearings 66, 90
transport seal 14, 45, 98
V
venting 15-17, 34-36, 40-43, 48, 53,
54, 56, 57, 61, 67, 76, 83, 86, 89,
96, 98, 103
vibration 10, 15-17, 47, 48, 98