LEYBOLD MAG Series User Manual

GA05141_0702 - 09/2004
2
Contents
Page
General safety information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1 Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.1 System overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.2 Compatibility with pumped media . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.3 Design of the MAG . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.4 Function and design of the MAG.DRIVE
digital
. . . . . . . . . . . . . . . . . . . . . . . . . . 12
1.5 Standard specification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
1.6 Technical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
1.7 Ordering data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Pump configuration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
2.1 Unpacking - storing - transportation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
2.2 Operating environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
2.3 Connecting the MAG to the vacuum chamber . . . . . . . . . . . . . . . . . . . . . . . . 45
2.4 Connecting the backing pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
2.5 Connecting the cooling water . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
2.6 Connecting the purge gas. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
2.7 Installing the MAG.DRIVE
digital
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58
2.7.1 Power supply connection X19. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
2.7.2 Pump connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
2.7.3 Control plug X14. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
Emergency off. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
2.7.4 Interface connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62
3 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
3.1 General operation rules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
3.2 Temperature Management System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
3.3 Power control system (PCS) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
3.4 Operation at high gas throughput or high forevacuum pressure . . . . . . . . . . . 70
3.5 Bakeout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
3.6 Operation with the START and STOP keys . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
3.7 Remote control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
Section

LEYBOLD MAG Series Specifications

General

Applications	Laboratory, medical, and industrial applications
Drive	Magnetic drive
Sealing	Hermetically sealed
Flow Rate	Varies depending on the model, ranging from a few liters per minute (LPM) to several tens of LPM. Consult specific model datasheets for precise values.
Max Pressure	Varies by model (typically up to 10 bar)
Power Supply	Typically available in various AC voltages (e.g., 115V, 230V) and frequencies (50/60 Hz)
Power Consumption	Varies depending on the model, ranging from a few watts to several hundred watts. Consult specific model datasheets for precise values.
Operating Temperature	Typically 0°C to +60°C
Weight	Varies depending on the model, ranging from a few kilograms to several kilograms. Consult specific model datasheets for precise values.
Dimensions	Varies depending on the model. Consult specific model datasheets for precise dimensions.
Materials	Stainless steel