GA05141_0702 - 09/2004
91
Maintenance
4.4 Cleaning the frequency
converter internally
Depending on the installation site the converter may collect grime (dust,
moisture) on the inside. Such contamination may lead to malfunctions,
overheating or short circuits. Therefore the converter must be cleaned after
5 years.
Only the Leybold service can clean the converter internally.
4.5 Removing the pump from the
system
MAG which have been used in semiconductor processes are contamina-
ted by semiconductor process gases. Most of these gases form acids
when exposed to moist air which causes serious corrosion damage to the
pump.
In order to prevent corrosion damage in the case of MAGs which have been
removed, the pump needs to be packaged in a sealed package. For this
the shipping package of the replacement pump may be used, for example.
Failure to seal a contaminated MAG voids the warranty.
For safety reasons we recommend to use a metal seal kit (see Fig.
58) for shipping of contaminated pumps.
Proceed as follows to seal the turbomolecular pump immediately after
removing it from your process.
Purge the pump for two hours with the backing pump running. This helps
to remove a large quantity of the process gases from the pump. We recom-
mend purging the pump via the intake flange and the purge valve with
approx. 200 sccm.
Press the STOP button at the MAG.DRIVE
digital
and wait until the pump has
come to a standstill.
Afterwards turn the mains switch to the “0” position.
The cables between the MAG and MAG.DRIVE may be disconnected only
after the MAG has come to a full stillstand and the mains is switched off.
When the pump has been pumping hazardous gases, ensure that
proper safety precautions are taken before opening the intake or
exhaust connections.
Use gloves or protective clothing to avoid skin contact with toxic
or highly corrosive substances. Work under a fume hood if avail-
able.
Disconnect the cables from the pump.
Disconnect the cooling water lines. Remaining cooling water may flow out.
Protect all parts below.
Remove all bolts but 2 which hold the intake flange. The 2 remaining bolts
must be directly opposite.
Disconnect the forevacuum line.
Warning
Warning
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