LEYBOLD MAG Series User Manual

GA05141_0702 - 09/2004
67
Operation
Venting
As to suitable gases, see Section 2.6.
Venting Method
The pump must be vented via the purge gas and venting valve or the
vent port when shutting the pump down.
When additionally venting the vacuum chamber, the venting function of the
purge gas and venting valve must be opened before opening the chamber
valve. This will ensure the presence of a higher pressure in the magnetic
bearings compared to the remaining vacuum area. This will prevent parti-
cles, dust or aggressive gases from being forced into the not yet vented
motor chamber of the pump.
Speed of the pressure rise
All turbomolecular pumps may be vented at full speed. However, the pres-
sure must not increase faster than specified through the pressure rise
curve.
The pump must be vented significantly slower when there is the risk of par-
ticles entering into the pump from the process. During venting, the flow
must be of the laminar type in both the vacuum chamber and the turbo-
molecular pump.
The pump must not be vented to pressures above atmospheric pressure.
10
3
mbar
10
2
10
1
10
0
10
-1
10
-2
10
-3
Fig. 50 Curve for safe venting of the MAG;
pressure rise as a function of venting time
010 20304050 60
Time/s
Forevacuum pressure

LEYBOLD MAG Series Specifications

General

Applications	Laboratory, medical, and industrial applications
Drive	Magnetic drive
Sealing	Hermetically sealed
Flow Rate	Varies depending on the model, ranging from a few liters per minute (LPM) to several tens of LPM. Consult specific model datasheets for precise values.
Max Pressure	Varies by model (typically up to 10 bar)
Power Supply	Typically available in various AC voltages (e.g., 115V, 230V) and frequencies (50/60 Hz)
Power Consumption	Varies depending on the model, ranging from a few watts to several hundred watts. Consult specific model datasheets for precise values.
Operating Temperature	Typically 0°C to +60°C
Weight	Varies depending on the model, ranging from a few kilograms to several kilograms. Consult specific model datasheets for precise values.
Dimensions	Varies depending on the model. Consult specific model datasheets for precise dimensions.
Materials	Stainless steel