Linxon LX218 - Page 68

7 | Warning and error messages LINXON
68 / 90 LX218-Operating-Manual-en1-04-(1908)
No. of the
error
message
Displayed message Description and possible remedy for the
cause
in ULTRA is p2 > (ULTRA pressure
threshold + 0.1 mbar)
E49 Output voltage of the
external pressure gauge is
too high.
• Sensor of the pressure measuring point
is defective
• Electronics pressure measuring point is
defective
E50 Output voltage of the
external pressure gauge is
too small.
• Check cable for pressure measuring
point
• Sensor for pressure measuring point
short to ground
• Electronics pressure measuring point is
defective
E51 Characteristic impedance
of the external pressure
gauge is too small.
Characteristic impedance of the external
pressure measuring point is too small.
• Check cable for pressure measuring
point
• Incorrect external pressure measuring
point used
• Electronics pressure measuring point is
defective
• Input is short-circuited
E52 Inlet pressure p2 too low! The output voltage of pressure measuring
point P2 is too small
• Check cable to Pirani sensor
• Pirani sensor is defective
• Sensor electronics I/O board is defective
E54 Foreline pressure p1 too
low!
The output voltage of pressure measuring
point P1 is too small
• Check cable to Pirani sensor
• Pirani sensor is defective
• Sensor electronics I/O board is defective
E56 p1 > 10 mbar after run-up The foreline pressure P1 is > 10mbar after 5
min. in run-up
• Backing pump is defective
• Leaks in the vacuum system
• Valve V1 does not open