6-15
6.2.13 Remove the Vaporizer Manifold Assembly
Single-vaporizer Manifold Assembly
1. Disconnect the gas tubes from the vaporizer manifold and then unscrew the four
screws as shown below.
2. Pull out the manifold assembly.
The following picture shows the appearance of single-vaporizer manifold assembly.
Single-vaporizer manifold assembly
Remove the gas tubes