7-37
S/N P/N Description Qty
12 M6Q-020010--- Check valve AKH08A-02S 1
13 M6Q-020039--- Pressure reducing valve to decrease pressure
from 2 to 15 MPa to 0 to 1 MPa
1
7.1.28 Double-vaporizer Manifold Assembly
7.1.28.1 Exploded View
7.1.28.2 Parts List
Note: The P/N of this assembly is 0621-30-69558.
S/N P/N Description Qty
1
0611-20-45412
Slide bar 4
2
M6M-010014---
Seal, O-ring 14.00X2.65 silicone A50 black 4
3
0611-20-45413
Connector 4
4
11-20-45403
Spring 4
5 0611-20-45411 Compression slice 4
6 M6M-040001--- Rubber plain washer.6.00X14.00X3.00 silicone A70 red 4
7 0611-20-45416 Locking plate 2
8 M04-051147--- Stainless steel cross recessed countersunk head screw
GB/T819.2-1997 M3X8 polishing
4