6.1 Outline
29
Power Supply Unit
INSTRUCTION MANUAL
6
6.1.2 Operation Flowchart
Fig. 6-1 Start-up Preparation Flowchart
Pump internal
pressure < 200 Pa
NO
YES
NO
YES
Start-up preparation complete
(LOCAL operation)
REMOTE
operation
LOCAL
operation
Pump internal
pressure < 200 Pa
Start-up preparation complete
(REMOTE operation)
Backing vaccum pump
operates.
Turn POWER switch from
0 (OFF) to 1 (ON).
Start cooling water.
(for cooling water method)
Set the REMOTE/LOCAL
selection switch to LOCAL.
Set the REMOTE/LOCAL
selection switch to REMOTE.
Turn POWER switch from
0 (OFF) to 1 (ON).
"REMOTE" signal output ON.
Backing vaccum pump
operates.
Start-up preparation flowchart
Start cooling water.
(for cooling water method)
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