SUSS MicroTec MJB4 - TSA Microscope Manipulator; TSA Microscope

OPERATION OF THE MJB4
18 MJB4 - Operation Rev02 01-06
3
3.2.3. TSA Microscope
Manipulator
The microscope manipulator is moved in the X and
Y directions using the split knurled knob on the right
side of the manipulator.
The upper knob moves the microscope in the X
direction. The travel path is ±40 mm.
The lower knob moves the microscope in the Y
direction. Here the travel path is +30 mm/-50 mm.
Before exposure and during mask
loading and unloading, the microscope
moves up by 20mm and the exposure
unit moves approx. 150 mm toward the
operator.
TSA microscope manipulator
1 Movement in the Y direction
2 Movement in the X direction
3.2.4. TSA Microscope
3.2.4.1. M500 Microscope
Brightness is regulated with the left controller under
the main power switch.
TSA Beam Splitter
This slide to the right of the microscope selects the
lens image for the eyepiece, the monitor or both.
TSA Z Motion
These large knobs are above the microscope on
both sides.
Fine focusing takes place with very little torque up to
one revolution. Further rotation with increased
torque activates coarse focusing.
TSA Lighting Aperture
The aperture diaphragm is used to set lens lighting
separately.
4x Lens Revolver
Lenses can be changed by turning the thumbwheel
by 90°.
0.0.0.1 M604 Microscope
Before using the microscope, the microscope
lighting must be switched on using the touch panel.
Brightness is regulated with the controllers under the
main power switch.
TSA Beam Splitter
This slide to the right of the microscope selects the
lens image for the eyepiece, the monitor or both.
TSA Z Motion
These large knobs are behind the microscope body
on both sides. Fine focusing takes place with very
little torque up to one revolution. Further rotation
with increased torque activates coarse focusing.
TSA Theta Motion
The small knob on the front upper right side rotates
the microscope around the Z axis.
Fine Setting of Lens Focus
Separate fine focusing of the M604 microscope is
only possible using the controllers to the left and
right of the microscope body.