OPERATION OF THE MJB4
MJB4 - Operation Rev02 01-06 29
3
3.5. Adjusting the Substrate
with the Upper Micro-
scope
In this mode the substrate is adjusted using the TSA
microscope. The following example explains the
necessary steps for adjustment and exposure with
manual mask loading, soft contact exposure and
wedge error compensation in contact mode. With
the machine in its initial state, the following
procedure steps must be carried out:
3.5.1. Setting the Exposure Values
See section 1.3.3. "Setting Exposure Values".
3.5.2. Loading the Mask
See section 1.3.5. "Loading the Mask".
WARNING:
In order for all the processes to start,
the MAIN MENU must be selected and
the contact lever must be pressed!
3.5.3. Loading the Substrate
See section 1.3.6. "Loading the Substrate".
Press this button to display a description of the
individual procedure steps including the substrate
adjustment.
– Load the mask holder with mask,
– Pull out the slide and load the chuck,
– Place the substrate on the chuck,
– Insert the slide completely,
– Raise the substrate with the contact lever (WEC).
Caution!
The microscope pivots downwards!
Setting the Separation Lever to the Adjusting
Position
Never adjust the substrate if the mask
and substrate are in contact! Doing so
will damage the mask and substrate.
Experienced operators can use the contact lever
without first selecting the LOAD SUBSTRATE
button.
3.5.4. Adjusting the Microscope
Setting the TSA Microscope
The split-field switch must be set to the middle
position for the M604 microscope. If a video camera
or monitor is not available, then you have to look
through the microscope eyepieces.
Microscope Lighting
Switch the lighting to INCIDENT LIGHT
MICROSCOPE in the display. Set the brightness
using the left/right potentiometers on the left front
plate.
The left and right aperture diaphragms on the
microscope allow you to set the lighting on the left
and right separately.
Mask Level Focusing
Coarse focusing is possible using the TSA Z motion
located behind the TSA microscope.
Fine focusing is set separately on the microscope.
To do this, use the OBJECTIVE FOCUS FINE
MANUAL knob on the microscope.
Set the TSA Microscope to the Mask Adjusting
Crosses.
The right/left microscope is set to the right/left mask
adjusting crosses with OBJECTIVE X-
SEPARATION.
3.5.5. Adjusting the Substrate
Substrate Level Focusing
For fine lens adjustment, use the OBJECTIVE
FOCUS FINE MANUAL knob on the microscope.
Adjustment (menu in the SUBSTRATE ADJUST-
MENT display)
Use the X, Y and theta micrometer screws on the
adjusting table for this. Adjust the substrate
adjusting crosses so that they are central-
symmetrical to the mask adjusting crosses.
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