SUSS MicroTec MJB4 - Loading the Mask; Loading the Substrate; Setting the Mask Substrate Thickness

OPERATION OF THE MJB4
26 MJB4 - Operation Rev02 01-06
3
3.3.5. Loading the Mask
Caution!
If the microscope is in the lower posi-
tion when loading or unloading the
mask, the microscope must be moved
to the upper position by pressing the
“MICROSCOPE IS DOWN” button. The
button changes to “MICROSCOPE UP”
and displays the actual position of the
microscope.
Mask Loading Routine
Remove the mask holder by loosening both knurled
screws on the mask holder frame and then place on
a tray upside down. Unload any masks if necessary
and insert the desired mask.
For safety reasons, the MASK VACUUM ON button
must be pressed for 3 seconds to switch off the
mask vacuum.
The mask can be removed when the button switches
to MASK VACUUM OFF.
Load the Mask
Caution!
The microscope pivots upwards!
Place the mask on the mask holder against the stop
pins.
The MASKVACUUM IS OFF button is used to switch
on the mask vacuum.
Loading and Clamping the Mask Holder
With the top side facing up, push the mask holder
into the adjusting station and then fasten it in the
mask holder frame using the knurled screws.
WARNING:
Proper exposure is not possible if the
mask holder is not clamped in the ad-
justing station.
3.3.6. Loading the Substrate
Pulling out the transport slide and loading the
substrate
Pull out the transport slide as far as it will go. Insert
a suitable substrate retainer (chuck) with the
substrate resting on the stop pins.
There is a hand valve on the front right side of the
transport slide that switches on the transport
vacuum for the contact and vacuum chuck.
Carefully insert the transport slide until it reaches the
end stop.
3.3.7. Setting the Mask Substrate
Thickness
For newly loaded equipment, the thickness setting at
the adjusting station must be checked and reset if
necessary.
To do so, turn the thickness setting on the adjusting
table clockwise until it is at its lowest position. Now
load the new equipment with mask and substrate
and select the WEC SETTINGS menu.
Move the substrate towards the mask by pushing
the contact lever forwards. Afterwards turn the
thickness setting upwards (counterclockwise) until
MOVE WEC SETTING TWO TURN CW DOWN
NOW appears in the top left of the display.
WEC SETTING OK is displayed when you have
turned the thickness setting back two turns.
Clamp down the black lever on the setting knob to
prevent it from rotating any further.
The contact lever must be pulled back in order to
return to the MAIN MENU.