OPERATION OF THE MJB4
22 MJB4 - Operation Rev02 01-06
3
3.3. Operating Sequences
A brief introduction can be found in section 1.8.
"Step-by-step Machine Operation".
3.3.1. Switching the Machine On/
Off
3.3.1.1. Preparation for Switching the
Machine ON
The following explanations assume that the mask
aligner is properly installed and the device is
connected to the power supply when the main
switch is turned on.
The machine should have the following pressure
values:
• Compressed air: 5.5 bar
• Nitrogen: 1.5 bar
• Vacuum: -0.8 bar (0.2 bar absolute)
3.3.1.2. Switching on the Machine
Turn the main switch with emergency off function
(front plate, left) to ON and press the Electronics ON/
OFF button (front plate, right). The start page
appears in the display.
The machine initializes --> about 5 seconds waiting
time.
After the
“MJB4 PRECISION MASK ALIGNER - ready”
message appears, press the right arrow button to
return to the MAIN MENU.
If this button is pressed too early in the start menu,
the following message appears:
“Machine initialization - please wait”
The exposure lamp is switched on automatically if a
CPC200/CPC350 ballast is used.
The CICI200 ballast is in stand-by mode after the
machine is switched on. The lamp must be switched
on separately using the display.
If the CIC1200 must be recalibrated after replacing
the lamp, proceed as described in section 1.3.2.
"Switching On and Calibrating the Exposure Lamp".
3.3.1.3. Switching Off the Machine
The machine is switched off using the Electronics
ON/OFF button.
During the cool down phase, observe the following:
CPC200/CPC350:
The machine switches off automatically after the
cool down phase is complete (10 minutes).
CIC1200:
The cool down phase is only activated if the CIC ON/
OFF button was pressed. This is the case
regardless of whether the lamp was switched on or
not. The machine shuts down automatically after the
cool down phase is complete (10 minutes).
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