SUSS MicroTec MJB4 - List of Abbreviations

APPENDIX MJB4
40 Appendix MJB4 E Rev02 01-06
4
4.2. List of Abbreviations
Θ Theta rotation
CIC Constant intensity controller
CPC Constant power controller
IR InfraRed
N
2
Nitrogen
PLC Programmable Logic Controller
TSA Top Side Alignment
Vac Vacuum
WEC Wedge error compensation