OPERATION OF THE MJB4
MJB4 - Operation Rev02 01-06 27
3
Set WEC
3.3.8. Wedge Error Compensation
Pressure
For wedge error compensation (WEC), the substrate
must be pushed against the mask with a defined
amount of force. The WEC pressure is used to
compensate for the greater weight of a large chuck.
The WEC pressure must also be proportionally
adjusted to the substrate surface. The pressure for
wedge error compensation can be set to meet
specific processor requirements (value between 0.0
and max. 2.0 [bar]). This can be done using the
WEC PRESSURE setting knob.
The set value is indicated in the WEC SETTINGS
menu.
3.3.9. Wedge Error Compensation
(WEC)
The WEC is performed manually.
To perform WEC using the contact lever, the
separation lever must be in the contact position. The
substrate is moved against the mask with the
previously set pressure (see 3.3.6) and WEC is
performed. The mask and substrate are now
completely parallel to each other.
After the WEC head stops, the separation lever must
be moved to the “adjusting distance” position in
order to make an adjustment.
No adjustment is necessary if the mask
and substrate are in contact.
Doing so may damage the mask and
substrate.
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