SUSS MicroTec MJB4 - Default Chapter; Table of Contents

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CONTENTS

MJB4 - Contents Rev02 01-06 I

CONTENTS

1. Warnings and Safety Precautions ......................................................................1

1.1. Guidelines on Safety at Work .........................................................................1

1.2. Definition of Danger Advice and Warnings .....................................................1

1.3. Intended Use of this Machine .........................................................................1

1.4. Main Switch with Emergency Off Function .....................................................1

1.5. Dangers ..........................................................................................................2

1.5.1. Physical Dangers ..................................................................................2

1.5.2. Thermal Dangers ..................................................................................2

1.5.3. Electrical Dangers .................................................................................2

1.5.4. Radiation Danger ..................................................................................2

1.5.5. Danger of Poisoning ..............................................................................3

1.6. Working with the MJB4 Mask Aligner .............................................................3

1.6.1. Fitting, Changing and Cooling the Exposure Lamp ...............................3

1.6.2. Preparing the Machine for Working .......................................................5

1.6.3. Safety Checks .......................................................................................5

2. Installation and Transport ...................................................................................7

2.1. Prerequisites for Installation............................................................................ 7

2.1.1. Ambient Requirements ..........................................................................7

2.2. Transporting the Mask Aligner ......................................................................10

2.2.1. Warranty and Restrictions ...................................................................10

2.2.2. Receiving and Unloading the Machine ................................................10

2.2.3. Opening the Shipping Containers .......................................................10

2.2.4. Transport without a Pallet ...................................................................10

2.2.5. Transport Safeguards .........................................................................12

2.2.6. Taking the Machine out of Service ......................................................13

3. Operation of the MJB4 .......................................................................................15

3.1. Definitions .....................................................................................................16

3.1.1. Notations .............................................................................................16

3.2. Controls and Displays ...................................................................................16

3.2.1. Adjusting Table ...................................................................................16

3.2.2. Display/Touch Screen .........................................................................17

3.2.3. TSA Microscope Manipulator ..............................................................18

3.2.4. TSA Microscope ..................................................................................18

3.2.5. Microscope Lighting ............................................................................19

3.2.6. Lamp Housing .....................................................................................20

3.2.7. Buttons in the Display / Touch Screen ................................................20