SUSS MicroTec MJB4 - Index

APPENDIX MJB4
42 Appendix MJB4 E Rev02 01-06
4
4.3. Index
A
Adjusting table
13
Adjusting the substrate
30
B
Ballast
24
C
Changing the lamp
5
Check adjustment
21
Compressed air
22
Controls
16
Coordinate System
17
D
Danger of a lamp explosion
4
Danger of poisoning
4
Danger through radiation
3
Dangers
3
Default settings
40
Display/Touchscreen
18
Distance exposure
34
E
Electrical dangers
3
Exposure
21
Exposure lamp
4
Exposure programs
34
Exposure Values
25
F
First Exposure
29
Flood exposure
35
H
Hard contact exposure
34
I
Installation
8
IR lighting
31, 33
L
Lamp cooling
5
Lamp housing
21
Lamp test
21
Low vacuum
22
Low vacuum contact exposure
35
M
Main switch
2
Microscope Lighting
20
Microscope lighting
30
Mirror housing
14
MJB4 Mask Aligner
V
Multiple exposure
35
N
N
2 purge mask holder
22
Nitrogen
22
P
Parameters
40
Physical dangers
3
Power data
9
Programs
26
S
Soft contact exposure
34
Switch on
6
T
Thermal dangers
3
Thickness setting
18
Transport
11
Transport safeguards
13
TSA Microscope
19
TSA Microscope Manipulator
13, 19
V
Vacuum
22
Vacuum contact exposure
34
W
WEC pressure
22
Wedge Error Compensation (WEC)
28