SUSS MicroTec MJB4 - Overview

APPENDIX MJB4
Appendix MJB4 E Rev02 01-06 49
4
4.5.1. Overview
4.5.1.1. Valves (Y)
Valve Block I
Valve Block II
Identifier Medium Function
9Y1 P Mirror house forward / backward
9Y2 P Exposure shutter closer
9Y3 P Exposure shutter opener
9Y5 P Lamp house heat sink cooling
8Y1 P TSA microscope up / down
8Y2 P TSA manipulator brakes X and Y direction
P Unassigned
1.1Y6 R Hard contact nitrogen / pressure controlled
1.1Y7 R Vent return atmosphere / soft and hard contact
1.1 Y12 R Vent return atmosphere / vacuum contact
R Unassigned
1.3Y2 P WEC – brake closer
Identifier Medium Function
9Y4 N
2
Lamp cooling (shutter and lamp socket top / bottom)
1.1Y1 V Chuck clamping on WEC - head
1.1Y2 V Wafer Vacuum (chuck)
1.1Y3 N
2
Vacuum reduction under wafer
1.1Y4 N
2
Hard contact nitrogen flow / volume controlled
1.1Y5 N
2
Wafer vacuum release / flow controlled
1.1Y8 V Main vacuum / vacuum chamber
1.1Y9 V Pre-vacuum / vacuum chamber
1.1Y10 N
2
Vacuum chamber reduction / nitrogen pressure
1.1Y11 N
2
Chamber nitrgen purge / volume controlled
1.2Y1 V Mask vacuum (valve open for constant vacuum)
1.3Y1 V WEC – brake opener
V Unassigned
V Unassigned