APPENDIX MJB4
50 Appendix MJB4 E Rev02 01-06
4
4.5.1.2. Throttles (R)
4.5.1.3. Vacuum / Pressure Sensors (C)
Identifier Function
1.1R3 Vacuum reduction under wafer
1.1R4 Hard contact nitrogen flow / volume controlled
1.1R5 Wafer vacuum release / flow controlled
1.1R6 Hard contact nitrogen / pressure controlled
1.1R9 Pre-vacuum flow / vacuum contact
1.1R10 Nitrogen flow / vacuum chamber reduction
1.1R11 Chamber nitrogen purge / volume controlled
1.2R2 Purge mask holder for negative resist
1.3R1 Determines speed to release WEC brake
8R1.1 Controls speed of microscope motion up
8R1.2 Controls speed of microscope motion down
9R1.1 Controls speed of mirror house motion forward
9R1.2 Controls speed of mirror house motion backward
9R2.1 Controls speed of exposure shutter 1 opened
9R2.2 Controls speed of exposure shutter 1 closed
9R3.1 Controls speed of exposure shutter 2 opened
9R3.2 Controls speed of exposure shutter 2 closed
9R4.2 Controls nitrogen cooling flow to lamp socket
9R4.3 Controls nitrogen flow for shutter cooling
9R5 Controls flow for heat sink
Identifier Medium Function
00C1 P Machine main air pressure
00C2 N
2
Machine main nitrogen pressure
00C3 V Vacuum
1.1C1 V Vacuum chamber
1.3C1 P WEC pressure
9C1 N
2
Nitrogen cooling flow to lamp socket
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