APPENDIX MJB4
Appendix MJB4 E Rev02 01-06 51
4
4.5.1.4. Pressure Regulators (CP)
4.5.1.5. Flowmeter (F)
4.5.1.6. Gauges (PD)
4.5.1.7. Sensors (B, S)
Identifier Function
0CP1 Machine main air pressure
0CP2 Machine main nitrogen pressure
1.3CP1 WEC pressure
Identifier Function
9F4 Lamp socket cooling
Identifier Function
PD1 Machine main air pressure
PD2 Machine main nitrogen pressure
PD3 Vacuum
Identifier Function
1B1 Z axis up (wedge error compensation)
1B2 Z axis align position
1B3 Z axis Z grab position
8B1 Microscope up / down
8S2 TSA manipulator brake X direction
8S3 TSA manipulator brake Y direction
9B1 Mirror house forward
9B2 Mirror house backward
0S1 Foot switch
1S4 WEC head brake
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