SUSS MicroTec MJB4 - Service Information

APPENDIX MJB4
48 Appendix MJB4 E Rev02 01-06
4
4.5. Service Information
The first digit in the identifiers of valves, chokes, sen-
sors, etc. always refers to the component numbers
listed above.
Component name Component no.
Pneumatic system 0
Adjusting table 1
TSA microscope 8
Exposure unit 9