OPERATION OF THE MJB4
30 MJB4 - Operation Rev02 01-06
3
Never adjust the substrate if the mask
and substrate are in contact! Doing so
will damage the mask and substrate.
Checking the adjustment see section 1.2.7. "Buttons
in the Display / Touch Screen".
3.5.6. Exposure
Once the substrate is adjusted and brought to the
exposure position using the SEPARATION LEVER,
press the EXPOSE button to perform the exposure.
You must press YES again on the display to confirm
the exposure.
If you press NO or use the CONTACT or
SEPARATION LEVER, the sequence is initiated
with the shutter closed. The substrate can now be
unloaded or readjusted.
Caution!
Microscope in motion!
3.5.7. Unloading the Mask
To release the mask holder, remove both screws on
the right side of the mask holder frame. Take out the
mask holder and place it on a tray upside down.
Switch off the mask vacuum by pressing the MASK
VACUUM IS ON button.
The mask can now be removed.
3.6. Adjusting the Substrate
with IR Lighting
For IR substrate adjustment, special IR cameras p/n
186259 and special IR lenses are required for the
opaque area.
The following example explains the necessary steps
for IR adjustment and exposure with manual mask
loading, soft contact exposure and wedge error
compensation in contact mode. With the machine in
its initial state, the following procedure steps must
be carried out:
3.6.1. Incident Light
The M500 microscope cannot be used for IR
incident light, and the M604 microscope requires a
special IR filter slide.
3.6.1.1. Setting the Exposure Values
See section 1.3.3. "Setting Exposure Values".
3.6.1.2. Loading the Mask
See section 1.3.5. "Loading the Mask".
WARNING:
In order for all the processes to start,
the MAIN MENU must be selected and
the contact lever must be pressed!
3.6.1.3. Loading the Substrate
See section 1.3.6. "Loading the Substrate".
Press this button to display a description of the
individual procedure steps including the substrate
adjustment.
– Load the mask holder with mask,
– Pull out the slide and load the chuck,
– Place the substrate on the chuck,
– Insert the slide completely,
– Raise the substrate with the contact lever (WEC).
Caution!
The microscope pivots downward!
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