YK11-0016-DI-002-08
ii
IMPORTANT
Author's copyright of this instruction manual belongs to
Components Division of ULVAC, Inc.
It is prohibited to copy a part and/or this entire manual without
authorization by Components Division of ULVAC, Inc.
It is prohibited to use this instruction manual except for
explanation when using the PMB100D, PMB300D, PMB600D
PMB1200D and PMB2400D
and other purpose Components
Division of ULVAC, Inc. agreed.
It is prohibited to hand over and disclose this instruction manual to third
parties without agreement by Components Division of ULVAC, Inc.
0.1 Safety Symbol Marks
We display symbol marks regarding the safety in this manual and on the product to make clear
items to observe. Descriptions attached to the symbol are classified as illustrated below;
0.2 Meanings of Safety Symbol Marks
DANGER
If the user makes a mistake in handling, it indicates an imminent
possibility that the user is subject to death or heavy injury.
WARNING
If the user makes a mistake in handling, it indicates a possibility that
the user is subject to death or heavy injury.
CAUTION
If the user makes a mistake in handling, it indicates a possibility
that the user is subject to moderate injury or it leads to significant
damage of the machine. It indicates a possibility that damage of the
machine is caused and the normal operation is impaired.
IMPORTANT
[IMPORTANT] description shall be
given where there is particular
information to notice for the operation or maintenance work of the
Training for the electrical safety is required as there is a risk of
electrical shock.
Check and ensure that the pump is
sufficiently cooled down as this
section keeps high temperature after having stopped the pump.