Ulvac PMB100D - Separate Evacuation of Lubricating Chamber

YK11-0016-DI-002-08
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5.6 Separate Evacuation of Lubricating Chamber
The oil flow from the lubricating chamber into the rotor chamber is reduced by the employment of a
special shaft seal in the PMB-D series mechanical booster pumps. The oil flow can be minimized by
evacuating the lubricating chamber by another vacuum pump.
Position of the exhaust port of rooms lubrication, refer to Section 5.6 Optional attachment figure.
Table. 8 Optional parts
Description
Function
Oil trap flange（Ｂ）
Oil trap plug
（Ｂ）
Allows pumping of the lubricating
chamber by a separate system.
※Please prepare:
1. A pump which exhausts mainly a lubrication room.
2. The pipe between a mechanical booster pump and the pump.
3. A connector which is attached to a mechanical booster pump.
Fig. 25 Separate evacuation of lubricating chamber
Fig. 26 Separate evacuation of lubricating chamber (example)