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Ulvac PMB100D - Run

Ulvac PMB100D
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YK11-0016-DI-002-08
43
(4) Check the lubrication oil discharge operation and direction of rotation.
a. Close the inlet valve of the Mechanical booster pump or put a Blind flange to the
inlet port to block it.
b. Run the backing pump to exhaust inside the Mechanical booster pump.
This time, confirm that the pressure of the inlet or outlet of the booster pump
comes down around the ultimate pressure of the backing pump (13.0-1.3Pa for
the standard backing pump) and keep exhausting three minutes or more only by
the backing pump under that state. Exhausting three minutes shall delete the air
component in the lubrication oil in the Mechanical booster pump.
c. Flow the Cooling water, and run the Pump around three seconds on keeping
watching the Oil level gauge to check the rotation direction.
Gear rotation shown in the Fig. 15 is correct. Refer to the pump’s nameplate, too.
If it rotated reverse, check the motor wire connection. The Motor is a three-phase
induction motor that would rotate reverse if two of three input wires were
connected reverse.
d. After checked the direction of rotation, run the Mechanical booster pump three
minutes or more to conduct the lubrication deaeration and lubrication circulation
inside the Pump unit.
Fig. 24 Gear rotation direction
4.2.2 Run
(1) Flow the Cooling water.
(2) Close the main valve of the Mechanical booster pump and start running the backing pump
to exhaust inside pipes.
(3) Open the main valve above the suction side of the mechanical booster pump, and exhaust
inside the vacuum chamber.
(4) Start the operation upon the vacuum chamber was exhausted to the pressure lower than
the maximum inlet pressure of the Mechanical booster pump.

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