Ulvac PMB100D - Pump Oil Level Check; Vacuum Pump Oil Check

YK11-0016-DI-002-08
65
6.2.1 Pump Oil Level Check
The pump oil level should be between the two level lines on the oil level gauge.
6.2.2 Vacuum Pump Oil Check
The vacuum pump oil will be gradually deteriorated not only by contamination with sucked gas, but
also by temperature rise during pump operation. Check the oil for contamination and viscosity and
discoloring periodically.
If substances of low boiling point (water, organic solvent, etc. ) are mixed with pump oil or sludge
collects on the bottom of the pump case, the ultimate pressure cannot be recovered by one oil
change, but the oil must be changed several times.
If the pump is operated using pump oil containing much moisture content, the ultimate pressure is
rise, leading to poor function of the mechanical friction parts of the pump. In the worst case, the
pump will seize up and cannot be rotated.
CAUTION
The Pump oil might deteriorate in a shorter time depending on the use.
It is recommended to replace the first pump oil within 10 days after
operation start and see how it got dirty to determine the oil
replacement cycle.
Proceed as follows (Refer to “3.2”).
(1) Shut down the pump and open the drain port to drain the oil in the Lubrication chamber.
Upon completion of draining the oil, close the drain port again and run the pump under no
load for approx. 5 seconds to drain the oil adhered to the pump parts.
(2) Close the drain port and fill fresh oil through the oil filling port. (Refer to Fig.8 ~ 12)
Fresh oil until the oil level comes the upper line of the oil level gauge.
(3) If the oil is severely contaminated, fill fresh oil and run the pump for several minutes under
no load to clean the pump interior. Repeat this operation several times depending on the
degree of oil contamination.
(4) After changing the oil with fresh oil, run the pump to warm it up and then check the
ultimate pressure.
(5) If the specified ultimate pressure cannot be attained by oil change, sludge or other deposit
may have collected on the bottom of the pump case. In that event, overhaul is required.
Contact your local ULVAC organization or representative.