Ulvac PMB100D - Outlet Port Piping

YK11-0016-DI-002-08
30
Use the flange for connection between the pump Inlet and the piping.
Provide a vacuum valve, vacuum gauge and vent valve between the vacuum chamber and pump,
as shown in Fig. 12.
MODEL Flange at the pipe
PMB100D VF50
JIS B 2290:1998
Vacuum technology-Flange dimensions;
Attachment book (Reference)
Flange dimensions for maintenance
PMB300D VF80
PMB600D VF80
PMB1200D VF100
PMB2400D VF200
3.4 Outlet port Piping
DANGER
Use of the toxic, combustible or combustion susceptible gas other
than inactive gas is not allowed as there is a risk of leakage of the
gas from the Pump unit if it was exhausted by the vacuum pump.
Use of the toxic, combustible or combustion susceptible
gas and
substance other than inactive gas is not allowed as there is a risk of
causing fire or explosion inside the Pump unit if it was exhausted by
the vacuum pump.
It is not allowed to use any corrosive gas other than inactive gas as
it might cause cor
rosion and/or give damage on pump parts when
discharged through vacuum pump.
Be sure to use pipes made of metal (electricity-conducting material)
.
Ensure also to take a grounding
If to exhaust any combustible, combustion susceptible or
corrosive
gas, be sure to use pipes made of high pressure withstanding and
corrosion resistant metal. Ensure also to take a grounding.
In the case of the process flowing combustible gas/susceptibility of
substances to burn gas, you are requested to introd
uce the diluent
gas.
Flow the diluent gas from the intake side so that the gas
concentration to be exhausted becomes lower than the explosion
limit.