EasyManua.ls Logo

Ulvac PMB100D - Page 58

Ulvac PMB100D
119 pages
Print Icon
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Loading...
YK11-0016-DI-002-08
31
WARNING
If the pipe connected to the outlet had a small diameter or
attached
foreign substance inside, it might raise the pressure inside the pipe
and impair the pump operation. A caution shall be required.
Mounting
a pressure gauge on the exhaust side of the auxiliary pump, when
the exhaust port pressure 0.03MPaG (0.3 kg
/ cm2 G) become (gauge
pressure) or more, please provided an interlock which the auxiliary
pump and the pump is stopped . In a state in which the auxiliary pump
is stopped, and to operate the pump, it will be the cause of the
internal pressure of the rising pump damage.
There is a risk that the pressure inside the Vacuum pump rises up to
cause break or oil leak of the casing or Oil level gauge resulting in
overload of the motor.
CAUTION
Wash sufficiently inside the Vacuum
chamber, pipes, Vacuum valve
and so on to connect them to the Pump. If dirty unit were connected,
it would cause a trouble such like raise the ultimate pressure or
extend the depression time to the specified pressure. Wear a pair of
gloves to touch any vac
uum section. Do not touch with the bare
hand.
Pay attention not to give damage to the Flange sheet face, Gasket
slot or gasket itself.
Use a pipe having bellows between the b
acking pump and outlet of
the Mechanical Booster Pump
so as to avoid any direct load to the
Pump flange.
Do not connect directly the backing pump inlet with the outlet of the
Mechanical Booster Pump.
Use the flange for connection between the pump Outlet and the piping.
MODEL Flange at the pipe
PMB100D VG50
JIS B 2290:1998
Vacuum technology-Flange dimensions;
Attachment book (Reference)
Flange dimensions for maintenance
PMB300D VG80
PMB600D VG80
PMB1200D VG80
PMB2400D VG200

Table of Contents