Ulvac PMB100D - Operation; Pumping Start Operation; Shutdown Operation

YK11-0016-DI-002-08
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5.6.7 Operation
When the preparations for operation are completed, make a test run.
Supply cooling water and put the pump into operation. The oil in the viewing window will bubble
immediately after the start of pump operation, but the bubbles will soon disappear.
During operation, check the following.
(1) Recheck the rotational direction of the pump.
(2) Make sure that the cooling water is flowing.
(3) Make sure that the oil level is between the two level lines.
Follow the procedure in the “4.1”, “4.2” Operation”.
5.6.8 Pumping start operation
Refer to the “Fig. 12”.
(1) Close the main valve above the inlet side of the mechanical booster pump and start the
pump for separate evacuation to evacuate the lubricating chamber of the mechanical
booster pump.
Then start the backing pump to evacuate the mechanical booster pump and piping.
(2) Open the main valve above the inlet side of the mechanical booster pump to evacuate the
vacuum chamber.
(3) When the vacuum chamber is evacuated to a pressure lower than the maximum intake
pressure (Refer to the “Table. 2”) , start the mechanical booster pump.
Follow the procedure in the “4.1”, “4.2” Operation”.
5.6.9 Shutdown operation
Refer to the “Fig. 12”.
(1) Close the main valve between the vacuum chamber and the inlet side of the mechanical
booster pump.
(2) Stop the mechanical booster pump.
(3) Stop the backing pump.
(4) Stop the pump for separate evacuation.
(5) Open the leak valve 1 to vent the mechanical booster pump and the backing pump to the
atmospheric pressure.
(6) Open the leak valve 2 to vent the lubricating chamber to the atmospheric pressure.
(7) Stop the cooling water supply.
Follow the procedure in the “4.1”, “4.2” Operation”.