Ulvac PMB100D - Operation Stop

YK11-0016-DI-002-08
44
4.3 Operation Stop
WARNING
Ensure to flow the cooling water with the specified volume. Lack of
the cooling water might give damage to the Pump unit or evaporate
the water remained in the Pump to raise the pressure inside the
Cooling system resulting in accidentally jetting out the hot steam.
The vacuum pump becomes high temperature during operation. Do
not touch the Motor and/or Pump unit until the Pump cools down after
having stopped operation.
Apply an appropriate protection to avoid to touch the surface as
necessary.
However, if the envir
onment was highly humid, keep the Mechanical
booster pump warmer than the room temperature after having
stopped it and make the atmospheric pressure inside the Pump.
Water in the air might condense in the Pump and worsen the ultimate
pressure and/or pumpin
g speed.
CAUTION
Be sure to close the Vacuum valve and stop the Pump operation to
open the Leak valve. Failure to follow this operation might cause the
oil invasion in the casing from the Lubrication chamber or otherwise
give damage to the Pump. Further the oil
might flow back to the
vacuum chamber if used the Oil rotation pump as the backing pump.
If failed in closing the Vacuum valve, the vacuum might leak from the
Exhaust system through the Pump.
CAUTION
Discharge the water in the Pump unit and Cooling water piping in
case where the environment temperature comes down below 5℃
under the state that the operation is stopped (Supply the compressed
air of 0.3MPaG (gauge pressure) through the Cooling water i
nlet
without closing the outlet.).
Residual water, if any, might freeze up and cause crack of the Pump
unit and/or Cooling water pipe.
CAUTION
To restart the Pump operation after once turned OFF the Power
Supply, ensure to check that the Rotor is stopped to turn it ON again.
(1) Close the main valve (inlet side)of the Mechanical booster pump and stop it.
(2) The Mechanical booster pump shall keep running a while by the Rotor inertia.
Check and ensure that the rotation stopped through the gear (or the motor)
to stop the backing pump.
(3) Open the Suction leak valve upon stopped the backing pump to make atmospheric
pressure inside the Mechanical booster pump and backing pump.
(4) Wait until the Pump cools down as far as you can touch by hand to stop flowing the
Cooling water.