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6.2.3 Oil Leak Check
The Pump system needs repair if occurred any oil leak from the Shaft sealing or Pump unit. Type
of the seals and O-rings are listed at the end of this document. Please contact the Service Center
close to you for purchase and repair.
6.2.4 Oil Leak form the Mechanical Seal
Structure of the Mechanical seal would allow a slight oil leak even the sealing was correct.
In case you look oil to the oil level gauge at the cover of motor side, that there is an oil leakage
from the Mechanical seal section.
You should drain out oil of the reservoir, and it relubricates the cover on the motor side.
Note to lubricate, be sure to stop running the Pump and return the Mechanical booster inside to the
atmospheric pressure.
However a deterioration of the mechanical seal may be considered, if the lubrication oil pooled
0.15mL/Hour or more at the bottom of the Motor flange
You need Replace the Mechanical seal.
Replacement parts and repair support at the local service center. Please contact us.
6.2.5 Check the coolant water
Keep flowing the Coolant water by the specified volume.
Check Water do not leak.
6.2.6 Check the metal mesh at the inlet
Performance of the pump may become deteriorated due to the metal mesh of the inlet port being
clogged by the dust containing in gas to be suctioned from the vacuum chamber.
Also, in the initial period of the start-up of the system, since the welding scale in the piping falls, the
special attention will be needed in particular.
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